- The main body is a composite device of a focused ion beam processing device and a scanning electron microscope.
- A laser processing unit, energy dispersive X-ray analyzer, electron backscatter diffraction device, and nano indenter device need to be equipped
- The main body and ancillary equipment can be operated directly or remotely, and must be automated.
- The system must have the ability to quantitatively analyze nano-level and three-dimensional material information.
- Quick and stable maintenance of this system of the system must be guaranteed